Multivariable Monocrystalline Silicon Differential Pressure Sensor

Features ■ Imported ultra-high stability differential pressure die ■ High accuracy and excellent stability ■ Static pressure error within ±0.1%FS/10MPa ■ Patented double overpressure protection diaphragm design ■ Unilateral overpressure limit of up to 40MPa ■ Constant voltage excitation ■ 316L stainless steel all welded integrated structure ■ Positive and negative pressure symmetrical, no O-ring inside ■ With small flange kit

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Description

Applications

Differential pressure transmitter core component

Differential pressure flow

Performance parameters
Supply		5V DC
	Operating temp.	-40～85℃
Storage temp.		-50～125℃
	Output voltage	60～140mV
Zero temp. coefficient		±0.05%FS/℃
	Temp. hysteresis	±0.1%FS（10kPa＜pressure range≤1000kPa）
		±0.5%FS（pressure range≤10kPa）
	Pressure hysteresis	±0.025%FS
Long-term drift		±0.05%FS/year
	Nonlinearity	±0.5%FS（10kPa＜pressure range≤1000kPa）
		±1.5%FS（pressure range≤10kPa）
Static pressure impact		±0.1%FS/10MPa
	Diaphragm material	316L

Structure & dimensions (mm)
Thread Code	Dimension
H2: M27X2
H9: M45X1.5
H10: M56X1.5

Differential pressure monocrystalline silicon or industrial grade chip range selection
Code	Pressure reference	Pressure range	Unilateral overpressure	Static pressure
6k	D	－6kPa～0～6kPa	16MPa	16MPa
40k	D	－40kPa～0～40kPa	16MPa	16MPa
100k	D	－100kPa～0～100kPa	16MPa	25MPa
250k	D	－250kPa～0～250kPa	16MPa	25MPa
1M	D	－1MPa～0～1MPa	16MPa	40MPa
3M	D	－3MPa～0～3MPa	16MPa	40MPa
Industrial grade chip range selection
Code	Pressure reference	Pressure range	Unilateral overpressure	Static pressure
16M	S	0～16MPa	200％FS	400％FS
25M	S	0～25MPa	150％FS	400％FS
40M	S	0～40MPa	150％FS	300％FS

Order Code:

product-885-614

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