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Piezoresistive Silicon Pressure Sensor

Piezoresistive Silicon Pressure Sensor

Features ■ With constant current and constant voltage excitation options ■ Imported highly reliable pressure die ■ Wide temperature compensation ■ Normalized output available ■ Compensation board filled with glue for protection against moisture ■ Φ19mm standard OEM ■ All 316L material ■ High performance, all solid, high reliability ■ 2 years warranty period

Description

Product overview

PC10 piezoresistive silicon pressure sensor is the core component for the manufacture of pressure sensors and pressure transmitters. As high-performance pressure sensitive component, PC10 can be easily amplified and assembled into the pressure transmitters with standard signal output.

PC10 packages diffused silicon pressure sensitive die to 316L stainless steel housing. External pressure is transmitted to pressure sensitive die through stainless steel diaphragm and internally sealed silicon oil. Pressure sensitive die does not directly contact with measured medium, forming all solid structure of pressure measurement. So the product can be applied to a variety of occasions, including harsh corrosive medium environment.

PC10 uses O-ring for pressure seal, which is easy to install.

The company can also undertake special customization based on the needs of users, such as pressure sensors of all welded structure, wide temperature compensation, high reliability, anti-shock and anti-vibration sensors, especially for national defense weapons and equipment.

Applications

#Process control systems

#Pressure calibration instruments

#Refrigeration equipment and

#HVAC control

#Hydraulic systems and valves

#Level measurement

#Biomedical instruments

#Ships and navigation

#Aircraft and avionics systems

#Weaponry

Electrical performance parameters

Pressure range

-100kPa~0~10kPa…100MPa

 

Pressure reference

Gauge pressure, Absolute pressure, Sealed gauge pressure

 

 

Excitation

1.5mA recommended for constant current

10V recommended for constant voltage

 

 

Input impedance

Constant current: 2kΩ~5kΩ

Constant voltage: 3kΩ~18kΩ

 

Electrical connection

Gold-plated KOVAR pin or silicon soft wire

 

 

Compensation temp.

Constant current: 0℃~60℃(≤35kPa), -10℃~70℃(other ranges);

Constant voltage: -20℃~85℃

 

Operating temp.

-40℃~125℃

 

Storage temp.

-40℃~125℃

 

Insulation resistance

≥200MΩ/250VDC

 

Response time

≤1ms (up to 90%FS)

 

Measured medium

All the liquids and gases compatible with 316L.

 

Mechanical vibration

20g (20~5000Hz)

 

Shock

100g (10ms)

 

Service life

10×106 (cycles)

 

Structural performance parameters

Diaphragm material

316L

 

Housing material

316L

 

Oil filling

Silicon oil

 

Sealing ring

NBR or fluorine rubber

 

 

Basic parameters

Item

Condition

Min

Nominal

Max

Unit

Note

Nonlinearity

 

-0.3

±0.2

0.3

%FS

Note⑴

 

Hysteresis

 

-0.05

±0.03

0.05

%FS

 

Repeatability

 

-0.05

±0.03

0.05

%FS

 

Item

Condition

Min

Nominal

Max

Unit

Note

Zero output

 

-2

±1

2

mV

 

 

Full scale span

1.5mA, ≤35kPa

40

 

90

 

150

 

 

mV

 

1.5mA, other ranges

60

output

10V, ≤35kPa

60

 

 

10V, other ranges

80

100

120

Zero temp.

10kPa

-2

±1.5

2

 

%FS

Note⑵

coefficient

other ranges

-1.5

±0.75

1.5

Span temp.

coefficient

 

 

-1.5

 

±0.75

 

1.5

 

%FS

Note⑵

Thermal hysteresis

 

-0.075

±0.05

0.075

%FS

Note⑶

Long term stability

 

-0.3

±0.2

0.3

%FS/Year

 

 

Structure and dimension  (Unit:mm)

Gauge pressure 10kPa~4MPa

Sealed gauge pressure or absolute pressure

<25MPa

Sealed gauge pressure

≥25MPa

 

product-316-271

 

 

product-373-312 product-573-481

 

Pressure range selection

 

Code

Pressure

reference

 

Pressure range

 

Overpressure

Burst

pressure

 

O-ring

 

10k

G

0~10kPa

300%FS

600%FS

NBR

 

20k

G

0~20kPa

300%FS

600%FS

NBR

 

35k

G, A

0~35kPa

300%FS

600%FS

NBR

 

70k

G

0~70kPa

300%FS

600%FS

NBR

 

100k

G, A

0~100kPa

200%FS

500%FS

NBR

 

160k

G, A

0~160kPa

200%FS

500%FS

NBR

 

250k

G, A

0~250kPa

200%FS

500%FS

NBR

 

400k

G, A

0~400kPa

200%FS

500%FS

NBR

 

600k

G, A

0~600kPa

200%FS

500%FS

NBR

 

1M

G, A

0~1MPa

200%FS

500%FS

NBR

 

1.6M

G, A, S

0~1.6MPa

200%FS

500%FS

NBR

 

2.5M

G, A, S

0~2.5MPa

200%FS

500%FS

NBR

 

4M

S

0~4MPa

200%FS

400%FS

NBR

 

6M

S

0~6MPa

200%FS

400%FS

Fluorine rubber

 

10M

S

0~10MPa

200%FS

400%FS

Fluorine rubber

 

16M

S

0~16MPa

200%FS

400%FS

Fluorine rubber

 

25M

S

0~25MPa

150%FS

400%FS

Fluorine rubber

 

40M

S

0~40MPa

150%FS

300%FS

Fluorine rubber

 

60M

S

0~60MPa

150%FS

300%FS

Fluorine rubber

 

100M

S

0~100MPa

150%FS

300%FS

Fluorine rubber

 

N1k

Omitted

-100~0kPa

300kPa

600kPa

NBR

 

N2k

Omitted

0~-100kPa

300kPa

600kPa

NBR

 

 

Pressure range selection (cont.)

 

Code

Pressure

reference

 

Pressure range

 

Overpressure

Burst

pressure

 

O-ring

N3k

Omitted

±100kPa

300kPa

600kPa

NBR

N4k

Omitted

-100~160kPa

480kPa

900kPa

NBR

N5k

Omitted

-100~250kPa

750kPa

1.25MPa

NBR

N6k

Omitted

-100~400kPa

800kPa

2MPa

NBR

N7k

Omitted

-100~600kPa

1.2MPa

3MPa

NBR

N8M

Omitted

-0.1~1MPa

2MPa

5MPa

NBR

N9M

Omitted

-0.1~1.6MPa

3MPa

9MPa

NBR

N10M

Omitted

-0.1~2.5MPa

5MPa

12.5MPa

NBR

Note: G: Gauge pressure, A: Absolute pressure, S: Sealed gauge pressure

 

product-908-595

 

product-1-1

 

 

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